TM5300-6 (Optical Wafer Thickness MicroGauge)
- Compact designable size
- Up to 6
- High accuracy & repeatability
- No calibration needed
- User friendly operation program (LTV, 3D)
- High speed measurement (500Hz for Warp / 1kHz for Thickness)
- Thickness / Warp / Bow / LTV / TTV / Stress measurement